Paper number 942

DEVELOPMENT OF A COMPOSITE GRINDING STONE FOR AN USE OF ULTRA PRECISION PROCESSING OF GLASS

Y. Tomita1, H. Eda1 , J. Shimizu1 and M.Jo1

1Department of System Engineering, Faculty of Engineering, Ibaraki University
12-1, Nakanarusawa, 4-Chome, Hitachi-shi, 316-8511, Japan

Summary A glass plate of ultra fine mirror finished surface is processed by a newly developed grinding stone in which ultra fine particles of cerium oxide(CeO2) are fixed by a special fixing method. Fine particles of CeO2 are previously immobilized in micro spherical cells, then are fixed into matrix of grinding stone. The mirror finished surface can be obtained by the developed grinding stone, and an insufficient removal rate can be recovered by intermittent supply of a small amount of CeO2 slurry. By the developed CeO2 grinding stone, a consumption of cerium oxide can be reduced to one fifth in comparison with a conventional polishing.
Keywords ceramic, cellulose, environment, cerium oxide particles, surface, hardness

Theme : Processing, Integrated Design and Manufacturing ; Machining and Tooling

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